Study on vacuum packaging reliability of micromachined quartz tuning fork gyroscopes
نویسندگان
چکیده
منابع مشابه
Introduction to the quartz tuning fork
We discuss various aspects of the quartz tuning fork, ranging from its original purpose as a high quality factor resonator for use as a stable frequency reference, to more exotic applications in sensing and scanning probe microscopy. We show experimentally how to tune the quality factor by injecting energy in phase with the current at resonance quality factor increase or out of phase quality fa...
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In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch due to the fabrication imperfections. The analytical solutions demonstrate that the stiffness misma...
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Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2017
ISSN: 1757-8981,1757-899X
DOI: 10.1088/1757-899x/244/1/012021